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Introduction to microfabrication

Franssila, Sami

Introduction to microfabrication - 2nd ed. - London: John Wiley & Sons, 2010. - xiv, 518 p.

ISBN: 9780470749838

Subjects--Topical Terms:
Microfabrication
Integrated circuits

Dewey Class. No.: 621.381 FRA

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