Gardner, Julian W <br/><br/>
Microsensors, MEMS, and smart devices 

 - New Delhi:  Wiley India,  2013. 
 - xvi, 503 p. 
<br/><br/><label>ISBN: </label>9788126540822 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381 GAR