TY  - BOOK
AU  - Gardner, Julian W
AU  - Varadan, Vijay K.
AU  - Awadelkarim, Osama O
TI  - Microsensors, MEMS, and smart devices
SN  - 9788126540822
U1  - 621.381 GAR 
PY  - 2013///
CY  - New Delhi
PB  - Wiley India
KW  - Microelectromechanical systems
ER  -