TY  - BOOK
AU  - Rebeiz, Gabriel M.
TI  - RF MEMS: theory, design, and technology
SN  - 9788126525805
U1  - 621.381 REB 
PY  - 2010///
CY  - New Delhi
PB  - Wiley India Pvt. Ltd
KW  - Microelectromechanical systems
ER  -