TY  - BOOK
AU  - Delchar, T. A.
AU  - Dobbs, E. R.
AU  - Palmer, S. B.
TI  - Vacuum physics and techniques
SN  - 9780412465901
U1  - 530 DEL 
PY  - 2023///
CY  - London
PB  - Chapman & Hall
KW  - Vacuum
KW  - Vacuum physics
KW  - Vacuum technology
ER  -