TY - BOOK AU - Jha, A.R. TI - MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications SN - 0849380693 U1 - 620.5 JHA PY - 2008/// CY - Boca Raton PB - CRC Press, Taylor & Francis Group KW - Medical instruments and apparatus KW - Microelectromechanical systems KW - Telecommunication--Equipment and supplies ER -