Kohler, Burton <br/><br/>
Lithography :   the science of microfabrication and nanofabrication 

 - New York :   Clanrye Internation.,  2023. 
 - vii, 240 p. 
<br/><br/><label>ISBN: </label>9781647266028 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Microfabrication Innovations<br/>Ion beam machining<br/>Microlithography
<br/><br/><label>Dewey Class. No.: </label>621.381 KOH