TY  - BOOK
AU  - Kohler, Burton
TI  - Lithography : : the science of microfabrication and nanofabrication
SN  - 9781647266028
U1  - 621.381 KOH 
PY  - 2023///
CY  - New York : 
PB  - Clanrye Internation.
KW  -  Microfabrication Innovations
KW  - Ion beam machining
KW  - Microlithography
ER  -