Franssila, Sami <br/><br/>
Introduction to microfabrication 

 - 2nd ed. 
 - London:  John Wiley & Sons,  2010. 
 - xiv, 518 p. 
<br/><br/><label>ISBN: </label>9780470749838 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication<br/>Integrated circuits
<br/><br/><label>Dewey Class. No.: </label>621.381 FRA