TY  - BOOK
AU  - Franssila, Sami
TI  - Introduction to microfabrication
SN  - 9780470749838
U1  - 621.381 FRA 
PY  - 2010///
CY  - London
PB  - John Wiley & Sons
KW  - Microfabrication
KW  - Integrated circuits
ER  -