| 000 | 00429nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 221011s9999 xx 000 0 und d | ||
| 020 | _a9788126525805 | ||
| 040 | _aPUL | ||
| 082 | _a621.381 REB | ||
| 100 | _aRebeiz, Gabriel M. | ||
| 245 | 0 |
_aRF MEMS : _btheory, design, and technology |
|
| 260 |
_aNew Delhi: _bWiley India Pvt. Ltd, _c2010. |
||
| 300 | _axx, 483 p. | ||
| 650 | _aMicroelectromechanical systems | ||
| 942 | _cBK | ||
| 999 |
_c13565 _d13565 |
||