| 000 | 00566nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 230515s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780412465901 | ||
| 020 | _a9789402420067 | ||
| 082 | _a530 DEL | ||
| 100 | _aDelchar, T. A. | ||
| 245 | 0 | _aVacuum physics and techniques | |
| 260 |
_aLondon: _bChapman & Hall, _c2023. |
||
| 300 | _aix, 253 p. | ||
| 440 | _aPhysics and Its Applications | ||
| 650 | _aVacuum | ||
| 650 | _aVacuum physics | ||
| 650 | _aVacuum technology | ||
| 700 |
_aDobbs, E. R. _eSED |
||
| 700 |
_aPalmer, S. B. _eSED |
||
| 942 | _cEBK | ||
| 999 |
_c37755 _d37755 |
||