| 000 | 00506nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 230823s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9781647266028 | ||
| 082 | _a621.381 KOH | ||
| 100 |
_aKohler, Burton _eEDI |
||
| 245 | 0 |
_aLithography : _bthe science of microfabrication and nanofabrication |
|
| 260 |
_aNew York : _bClanrye Internation., _c2023. |
||
| 300 | _avii, 240 p. | ||
| 650 | _a Microfabrication Innovations | ||
| 650 | _aIon beam machining | ||
| 650 | _aMicrolithography | ||
| 942 | _cEBK | ||
| 999 |
_c40236 _d40236 |
||