| 000 | 00456nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 221011s9999 xx 000 0 und d | ||
| 020 | _a9780470749838 | ||
| 040 | _aPUL | ||
| 082 | _a621.381 FRA | ||
| 100 | _aFranssila, Sami | ||
| 245 | 0 | _aIntroduction to microfabrication | |
| 250 | _a2nd ed. | ||
| 260 |
_aLondon: _bJohn Wiley & Sons, _c2010. |
||
| 300 | _axiv, 518 p. | ||
| 650 | _aMicrofabrication | ||
| 650 | _aIntegrated circuits | ||
| 942 | _cBK | ||
| 999 |
_c9647 _d9647 |
||