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Lithography : the science of microfabrication and nanofabrication

Kohler, Burton

Lithography : the science of microfabrication and nanofabrication - New York : Clanrye Internation., 2023. - vii, 240 p.

ISBN: 9781647266028

Subjects--Topical Terms:
Microfabrication Innovations
Ion beam machining
Microlithography

Dewey Class. No.: 621.381 KOH

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