Lithography : (Record no. 40236)

MARC details
000 -LEADER
fixed length control field 00506nam a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230823s9999||||xx |||||||||||||| ||und||
020 ## - ISBN
International Standard Book Number 9781647266028
082 ## - DDC NUMBER
Classification number 621.381 KOH
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Kohler, Burton
Relator term Editor
245 #0 - TITLE STATEMENT
Title Lithography :
Sub Title the science of microfabrication and nanofabrication
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc New York :
Name of publisher, distributor, etc Clanrye Internation.,
Date of publication, distribution, etc 2023.
300 ## - PHYSICAL DESCRIPTION
Pages vii, 240 p.
650 ## - Subject
Subject <a href=" Microfabrication Innovations"> Microfabrication Innovations</a>
650 ## - Subject
Subject <a href="Ion beam machining">Ion beam machining</a>
650 ## - Subject
Subject <a href="Microlithography">Microlithography</a>
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Engineering Books
Holdings
Withdrawn status Lost status Damaged status Not for loan Location (home branch) Sublocation or collection (holding branch) Shelving location Date acquired Source of acquisition Inventory number Koha full call number Barcode (Accession No.) Cost, replacement price Koha item type
0       Presidency University Library Presidency University Library Mechanical Engineering 2023-08-22 KL Book House, Bangalore on 09/08/2023 KLBH/277/2023-24 621.381 KOH 50711 4394.59 Engineering Books
0       Presidency University Library Presidency University Library Mechanical Engineering 2023-08-22 KL Book House, Bangalore on 09/08/2023 KLBH/277/2023-24 621.381 KOH 50712 4394.59 Engineering Books

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